TY  - BOOK
AU  - Geng, Hwaiyu
TI  - Semiconductor manufacturing handbook
SN  - 9781259587696
U1  - 621.38152 
PY  - 2018///
CY  - New York
PB  - McGraw-Hill Education
KW  - Semiconductors
KW  - design and construction
KW  - Integrated circuits
KW  - Materials handling
KW  - Metrology
KW  - Microelectromechanical syste,s
KW  - Microelectronic packaging
KW  - Microfabrication
KW  - Microlithography
N1  - Includes index
ER  -