Geng, Hwaiyu <br/><br/>
Semiconductor manufacturing handbook: 
Hwaiyu Geng. 
 - Second  edition 
 - New York:  McGraw-Hill Education  2018 
 - xxxi, 525 pages:  figures; 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>9781259587696 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--design and construction.<br/>Integrated circuits--design and construction.<br/>Materials handling.<br/>Metrology.<br/>Microelectromechanical syste,s.<br/>Microelectronic packaging.<br/>Microfabrication.<br/>Microlithography.
<br/><br/><label>Dewey Class. No.: </label>621.38152  / G287s